A Defect-Free Anodic Oxide Passivation for LSI/FPD Vacuum Chamber

Aluminum alloys were anodized in nonaqueous electrolyte solution and surface microroughness of anodic oxide grown on the alloys in nonaqueous electrolyte solution is found by far less than that grown in aqueous electrolyte solution. Barrier type anodic oxides on high-purity Al/Mg/Zr(AlMg2) alloys in nonaqueous solution are found to feature excellent characteristics: no voids or seams are formed, outgas from anodic oxides is very much limited, they feature outstanding resistance to process gases. Anodization of AlMg2 alloys in nonaqueous electrolyte solution will be promising surface passivation of LSI/FPD vacuum equipments.