A CMOS based microfluidic detector: Design, calibration and experimental results

In this paper, we describe a 0.18 mum CMOS capacitive sensor for microfluidic applications. This sensor features an interface circuit, which is incorporated with a calibration circuitry. We present the design and thereafter simulation and experimental results in the support of discussed issues throughout this paper. The proposed interface circuit offers the advantage of low complexity as well as sub femto Farad resolution.