A touch mode capacitive pressure sensor with long linear range and high sensitivity

A novel structure was developed which can improve linear range and sensitivity of touch mode capacitive pressure sensor (TMCPS) in this article. As for the double-notch touch mode capacitive pressure sensor (DTMCPS), an additional thin notch was etched on the bottom diaphragm of traditional TMCPS. Through modeling and analysis, it has been proven that the linear range can be expanded compared with normal structure with same size and the sensitivity can be improved compared with normal structure with same touch point pressure. Furthermore, the fabrication process of DTMCPS was compiled.