Analysis of charging phenomena of polymer films in scanning electron microscopy

A scanning electron microscope observation is indispensable in the evaluation of the fabricated micro-and nano-structure.In the present work, we study the charge distribution in PMMA films under EB irradiation with both the experiment and the numerical simulation. In the numerical simulation, the initial distribution of the deposited charge is calculated with the Monte Carlo simulation. It is shown that the EBIC plays a dominant role in the charge deposition in polymer films under EB irradiation.