Modeling of Feedthrough Capacitance for MEMS Folded-Beam Silicon Carbide Resonators

This manuscript analyzes the feedthrough capacitance of folded-beam MEMS-based silicon carbide (SiC) lateral resonators. Additionally, feedthrough capacitance for MEMS resonators via electrical measurement was estimated by matching simulated with measured Bode plots from a network analyzer. The feedthrough capacitance was 0.1-1 pF, as determined by Bode plots using feedthrough capacitance as a key input for the measured Bode plot.