A packaged micromachined switched tunable inductor

A new implementation of micromachined switched tunable inductors using transformer action and electrostatically- actuated switches is presented. The inductors and the micromachined ohmic switches are made of silver (Ag) to minimize the resistive loading on the effective inductance and achieve large tuning and high quality factor (Q). The presented tunable inductor is packaged using a low-cost wafer-level polymer packaging technique and shows no degradation in quality factor after packaging.