A micro-machined cantilever PSA sensor with digital wireless interface

A reusable miniature silicon sensor for prostate-specific antigen (PSA) is implemented. A micro-machined cantilever beam is fabricated as the basis of this sensor by photo-lithography. An 8-bit successive approximation analog-to-digital converter (SAR ADC) and an on-off-keying digital wireless transmitter are integrated to enable wireless data transmission. The detectable PSA solution ranges from 0.1 ug/ml to 200 ug/ml. Wireless interface is fabricated with TSMC 0.35 um 2P4M CMOS technology.