Position and vibration control of an XYZ flexure parallel mechanism

This paper presents a hybrid position and vibration controller with high robustness for an XYZ flexure parallel mechanism (FPM). In flexure mechanisms, unmodeled uncertainties, low damping and high sensitivity to external disturbances are three common problems which reduce the positioning precision and slow the dynamic response. The hybrid controller based on the H∞-theory solves the three common problems and are implemented on a 3-PPP XYZ-FPM.