P2F-3 Three Dimensional Periodic Finite Element Analysis of Solidly Mounted Resonators

Theoretical analyses and designs of high Q, thin film solidly mounted resonators are presented. The resonators analyzed in this paper operate at an ultra-high frequency (UHF) of 1.9 GHz for application to high frequency filter devices. A new accurate novel approach using three dimension periodic finite element analyses of solidly mounted resonators (SMR) is presented. The frequency spectra for the 1.9 GHz SMR which serve as a design aid in selecting the resonator dimensions/configurations for two different Bragg configurations are presented. Good agreement of the new approach with 2-D FE and 3-D FE analysis is demonstrated The frequency response analysis is carried out in order to calculate the Q's value and k² and is compared with the measured data. Further, the static frequency-temperature (f-T) behavior for the SMR's is calculated using the Lagrangian method.