11F-1 A Flexion Mode Piezoelectric Micro-Transformer Processed by Aerosol Deposition Method

This paper presents a design and fabrication of a disk- type piezoelectric micro-transformer. The working resonance mode of transformer is flexion mode. To reduce the boundary constrain force and raise the step up ratio, the four legs were used to support the disk structure. The outer diameter of transformer is 1500 mum. The 8 mum thick PZT film and 8 mum thick silicon film constructed the body of disk transformer. The lead- zirconate-titanate (PZT) was used as piezoelectric film and deposited by aerosol deposition method. The maximum step up ratio is 0.58 measured at 95.5 kHz.