A nanoparticule-based ferromagnetic dielectric Fe/Co composite for RF integrated inductors

A new ferromagnetic dielectric material formed from insulated Fe/Co nanoparticles is presented. This material is characterised using an original technique based on a silicon micromachined suspended CPW. Then, a spiral integrated RF inductor is designed which implements this material. Measurements demonstrate an up to 80% increase in the inductance value until 2 GHz, while the quality factor is improved until 1 GHz. These results confirm the high potentialities of this material for RF passive applications. Finally, because its dielectric nature, this material appears compatible with low cost microelectronic process.