H∞ deflection control of a unimorph piezoelectric cantilever under thermal disturbance

The effect of the temperature variation on a unimorph piezoelectric cantilever is studied. Its influences on the thermal expansion, the piezoelectric constant, the transient part and the creep are experimentally analyzed. Afterwards, a H_infin controller is synthesized in order to reject the thermal disturbance and to reach performances required in micromanipulation. Finally, the closed-loop experiments end the paper.