One-Side-Electrode-Type Fluid-Based Inclinometer Combined With CMOS Circuitry

In this study, electrical double layer theory is applied to realize one-side-electrode-type fluid-based inclinometer combined with CMOS circuitry. Charge-balanced capacitance-voltage conversion (C-V converter) circuit was designed as detection circuit and it was fabricated using 0.35 mum CMOS process. The sensor design and substrate penetration lithography method are demonstrated in sensor fabrication, and experiment to find a proper fluid for this application was implemented.