Sound source localization using piezoresistive Multi-cantilever microphones

We present experiment of sound source localization using the microfabricated piezoresistive multi-cantilever microphones and an ITD (interaural time difference) method which finds the sound source by phase delay of two signals. The multi-cantilever microphones are designed and fabricated to separate directly the single tone of frequency signals from the sound source. The resonant frequency of multi-cantilever is targeted on the center frequency in associate with a voice signal.