Improvement of in-line power monitor integration technology for a compact multifunctional silica PLC

A chip-scale-packaged photodiode (CSP-PD) for in-line optical power monitoring was integrated on top of a 2.5%-Delta silica-based planar lightwave circuit (PLC) with out-of-plane micromirrors. By using a spotsize converter (SSC) to suppress the beam divergence and by improving the micromirror fabrication process, we obtained a high responsivity of 0.7~ 0.9 A/W.