Design for Reliability (DfR) in MEMS using Worst-Case Methods

The growing applications of microsystem devices in extreme environments have a great impact on the rising importance of their reliability studies. Reliability study in MEMS lacks the availability of methods and tools to analyze them in a quick and efficient way. In this paper, we present a novel approach for reliability analysis in MEMS using worst-case methods. The method facilitates the designers to find out the critical operational parameters of the device with respect to a particular functional specification. This paper also introduces a reliability coefficient instigated from an inherent advantage of the worst-case methods.