Optical MEMS for Future Instruments in Astronomy

MOEMS devices are under study in order to be integrated in next-generation astronomical instruments for ground-based and space telescopes. Their main advantages are their compactness, scalability, specific task customization using elementary building blocks, and remote control. Several laboratories, including Laboratoire d'Astrophysique de Marseille in close collaboration with microtechnology institutes, are engaged since several years in the design, realization and characterization of programmable slit masks for multi-object spectroscopy and micro-deformable mirrors for wavefront correction. First prototypes have been developed and show results matching with the requirements.