High Temperature Operation of Gimbal-less Two Axis Micromirrors

We demonstrate seamless operation of gimbal-less two axis micromirror devices at high temperatures up to 200°C by characterizing the temperature stability of the mirror tilt angle and first resonant mode. The ability to provide a repeatable, high temperature vector or raster scanning micromirror opens up opportunities for ruggedized products in extreme environments. This capability is also relevant in high incident optical power applications, where energy is absorbed at the mirror. A first order thermal model is presented that allows the temperature rise of mirrors under high optical power operation to be estimated.