Current State and Prospect of Micro-Machining

Micro-machining is a delicate process that requires pinpoint accuracy. Researchers in academia and industry worldwide are striving to develop efficient fabrication techniques for features in ranges of a few micrometers and even nanometers. The current leading micro-machining processes are micro drilling, micro milling, and micro turning, micro EDM, micro USM, micro LBM, micro ECM and LIGA. In this paper, the latest advances of diverse micromachining technologies will be discussed. Challenges still exist in fields like innovation in workpiece and tool material, development of auxiliary tooling equipment together with processes combination, etc.