CMOS Compatible Out-of-Plane & In-Plane Magnetometers

Three-dimensional MEMS magnetometers with use of residual stresses in thin multilayers are presented. Half-loop cantilevers based on Lorentz-force deflection convert magnetic flux in ΔV changes thanks to piezoresistive transducers mounted in Wheatstone bridge. Magnetic field in the order of 10 Gauss was measured with a sensitivity of 0.015 mV/Gauss. Ferromagnetic nickel plates also show 20 μm- vertical deflection in magnetic field non-aligned with the residual magnetization.