Experimental Characterization of Micromachined Electromagnetic Probes using Scanning Hall Probe Microscopy

We present the experimental characterization of micromachined electromagnetic probe using scanning Hall probe microscopy. The tested electromagnetic probe consists of a protruding sharp Permalloy needle embedded into a three-dimensional gold conducting coil, which is fabricated with a simple and straightforward micromachining process. By using a scanning Hall probe microscope, a comprehensive high-spatial resolution characterization of the probe performance (e.g. peak magnetic intensity and spatial field distribution) is achieved for the first time.