Novel Micro Lens with Tunable Astigmatism

A novel astigmatism-tunable micro lens is reported in this paper. The device is based on a thermal-actuated tunable lens. Asymmetric boundary condition is further introduced on silicon conducting ring of lens to invoke asymmetric deformation of polymer lens as well as astigmatic change of PDMS-lens. The astigmatism is easily controlled via driving current. This study demonstrates the astigmatism variation by aspect ratio of anterior focus-spot, which changes from 9.34 to 1.12 while driving current increases from 0 mA to 70 mA. This astigmatism tuning approach paves the ways of MEMS-based aberration corrector and laser focus-spot shaper.