A Low Power, Microvalve-Regulated Drug Delivery System using a SI Micro-Spring Pressurized Balloon Reservoir

This paper reports on a drug delivery system that provides modulated delivery of liquid-phase chemicals. The device uses silicon torsion springs on a 2×3 cm² chip to pressurize a soft polymeric reservoir and regulate flow with a piezoelectricaly actuated silicon microvalve that is 1.5×1.5×1 cm³. Using the finished device, regulated diffusion of a fluorescent dye into agar gel was demonstrated. Fluid flow out of the 500 μL reservoir could be regulated from 10-500 μL/min with up to 80 kPa of delivery pressure. Typical regulation consumes 0.136 μW of power. Analysis of the valve, reservoir springs, and a model based on pressure-enhanced diffusion are presented and are validated by experimental data.