Verification of the Model of Interconnection Capacitances Dependence on Further Neighbourhood in the Bus-Microscopic and Electrical Measurements

An analytical model, taking into account the further neighbourhood influence on interconnection capacitances was proposed in our previous works. Previously a test chip designed for the AMS 0.35 mum technology and preliminary results of empirical verification of the model were presented. In this paper complete verification of that model is based on geometrical data obtained with scanning microscopy.