Design and Fabrication MEMS-Based Micro Solid State cantilever Wind Speed Sensor

The MEMS-based micro solid state cantilever wind speed sensor has advantages of small size and high sensitivity of low wind speed. The designed sensor was simulated with ANSYS software and was analyzed with fluid mechanics principle. The fabrication of the sensor mainly consists of wet anisotropic etching and DRIE(deep reactive ion etching) on a 3" silicon wafer. The designed sensor comprises two silicon cantilevers which thicknesses are 12μm, widths 500μm, and lengths 1530μm. Each sensor detects sensitive signal with Wheatstone bridge which comprises two platinum resistances on the cantilevers and two platinum resistances on non cantilever area. The fabricated sensor was tested within small wind tunnel. The result suggests that the designed sensor can detect low wind speed as low as 0.08m/s and has high sensitivity of low wind speed.