Study of FeCo-SiO2 Granular Films for High Frequency Application

In this work, Fe₆₅Co₃₅ alloy which has maximum saturation magnetization (Ms) among all metal magnetic materials was chosen to make Fe₆₅Co₃₅-SiO₂ granular films, and the magnetic properties in whole composition were studied. The results show that good high frequency soft magnetic films were obtained by carefully controlling the microstructure. A serious (Fe₆₅Co₃₅)_x(SiO₂)_1-x granular films are fabricated by RF magnetron co-sputtering. X-ray diffraction shows that all samples have bcc structure of Fe₆₅Co₃₅ alloys. Transmission electronic microscope (TEM) image and the corresponding electronic diffraction (ED) pattern for a typical sample of x = 0.57 show that the sample consists of bcc Fe₆₅Co₃₅ particles embedded uniformly in insulating SiO₂ matrix. Magnetic hysteresis loops measured by vibrating sample magnetometer (VSM) shows that the samples have in plane uniaxial anisotropy, and anisotropy field is around 60 Oe.