The Technology of Porous Silicon Substrate in Radio Frequency/Microwave circuits

Monolithic microwave IC (MMIC) is on low-resistivity silicon that mostly would bring line attenuation and deteriorate of circuit quality because of substrate extremely high dielectric loss. There has been a great demand for low-loss and low-cost substrate. Porous silicon (PS) has been proved as a promiseful substrate material for CPW, MEMS switch, and so on high frequency applications.