The mechanical behavior investigation of MEMS switches for millimeter wave phase shifters

In this paper, a novel low spring constant hinge beam structure is presented in order to reduce the driven-voltage of switch. The mechanical behaviors of switches are investigated using the IntelliSuite^TM tool. The simulation results show that the driven voltage of 2.5V and the time response of 30us are obtained respectively. Moreover, the frequencies of all mechanical vibrant modes of beam are higher than 15 kHz.