The Fabrication of THz Photonic Filters Using Ultraviolet Based SU8 Micromachining

Here we report on the development of an ultraviolet (UV) based exposure technique for the fabrication of high aspect ratio metallic pillar arrays. These arrays act as photonic band gap based filters. Completed structures show a relative transmission of up to 97% in the main pass band centred at 1.25 THz.