PS-4 GHZ Contour Extensional Mode Aluminum Nitride MEMS Resonators

This work presents higher-order contour mode piezoelectric AlN MEMS resonators with lithographically defined GHz operating frequencies. By selectively patterning the transduction electrodes and routing the electrical excitation waveform, the resonant frequency of the device is uncoupled from the overall dimensions of the AlN plate and spurious electrical responses are suppressed over a wide frequency range. Resonators employing either parallel or coplanar ground and signal electrode pairs have been developed. The design has been validated by demonstrating a 1.28 GHz resonator with a 231 Omega motional resistance and a Q factor over 1,400 when tested in air