The properties of integrated micro-electrodes for CMOS-compatible medical sensors

Platinum microelectrodes for invasive medical applications have been developed for blood conductivity sensors and for the detection of biopotentials. The electrodes are fabricated in a standard CMOS-technology with only one additional production step. They have been combined with analog and digital electronic components on a single silicon substrate with a size of 1/spl times/5 mm/sup 2/. The electrodes' impedance characteristics, noise performance and geometrical considerations have been analysed. Due to the close neighbourhood of sensing elements and signal conditioning, integrated microsystems using integrated electrodes show enhanced resolution and a good rejection from electromagnetic distortions.<>