Precise Velocity Control of the Air Floating Gantry Type Precision Stage with the Acceleration Feedback Compensation

Recently, the gantry type precision stage and its precise velocity control are required in the field of inspection machine and slit nozzle coater of the flat panel display, since the glass substrate becomes large. In this paper, the velocity control scheme with the acceleration feedback compensation is proposed and examined on a miniature gantry. It is shown that the acceleration PI (proportion and integral) feedback compensation is effective for reducing the velocity fluctuation and the range of deviation between the legs due to the input disturbance