Model for MEMS Switches Power Handling and Phase Noise

This paper focus on an electromechanical model for the MEMS varactors based on electrical/mechanical equivalencies. It allows the MEMS varactors capacitance computation and take into account MEMS power handling and phase noise due to Brownian noise. It has been validated with measurements on a shunt MEMS varactor but it can be extend to a wide range of MEMS components.