The Effect of Residual Stress on Pull-In Voltage of Fixed-Fixed End Type MEM Switches with Variative Electrostatic Area

In this paper we studied the effect of residual stress on pull-in voltage of fixed-fixed end type MEM switches with variative electrostatic area. We used the distributed model when the electrostatic pressure didn't apply at the whole of the beam and applied only in the mid-part of the beam. The model uses Euler-Bernoulli beam theory for fixed-fixed end type beams with respect to residual stress due to fabrication process. The derived nonlinear equation has been solved numerically, and has shown that the residual stress changes the pull-in voltage of fixed-fixed end type MEM switches with variative electrostatic area