Contributions of Novel Magnetic Granular Film in RF-MEMS Planar Integrated Inductor

Magnetic medium is an effective approach to RF planar magnetic inductor confirmed by computer simulations. The magnetic inductor was designed and fabricated using novel Permalloy-SiO₂ (PS) granular film as magnetic core. The granular film shows excellent soft magnetic properties and high resistivity by adjusting the composition and microstructure. The inductor with PS granular film exhibits a higher L than air-core inductor and a considerable Q above 10. The anisotropy of the granular film generated in deposition process make the magnetic inductor has a very high self-resonance frequency peak