Two-dimensional Photonic Crystal Microcavity with Germanium Self-assembled Quantum Dots

We fabricated two-dimensional photonic crystals on silicon-on-insulator substrate. Ge/Si self-assembled quantum dots were embedded in the PhC cavity as light emitters. The photoluminescence spectra of H1 cavity at room temperature showed strong optical resonance in the cavity. Significant enhancement of the luminescence was achieved and a main peak at 1.43 mum was seen to dominate the spectrum. Reasonable shift of the resonant peak wavelength was observed by changing the PhC parameters. The results prove that combination between photonic crystal and Ge quantum dots is a reasonable way to realize Si-based light source.