Micro-Raman scattering: A versatile tool for characterization of semiconductor structures

As a non-destructive and relatively rapid method, Raman spectroscopy is well established for the characterization of semiconductor substrates, heterostructures and devices. Some applications of micro-Raman spectroscopy to measurements of stress, crystallinity and charge carriers in semiconductor structures are discussed with emphasis on the scope and the limitations of the information that can be obtained with Raman spectroscopy