Static and dynamic modeling of thermal microgripper

The performance of any micro-component affects the overall performance of the system especially in the micro-level. In this research work, the thermal and structural performances of microgripper based on silicon are studied. The present study is part of a larger effort in developing, modeling and characterization procedures toward understanding the behavior of microgripper. This is essential to develop better control algorithms and to facilitate the study of robot arms dynamic on gripping performance. The structural stiffness and failure of microgripper in static loading are characterized for two actuation modes: in-plane and off-plane. Moreover, building block attempts are introduced for dynamical modeling of microgripper/sensor and environment. The electromechanical system model of sensor is experimentally identified and utilized in identifying the performance of hypothesized lumped models of microgripper