Results of a Multi-Site Round-Robin to Examine Probed Measurements of an Impedance Standard Substrate

The results from a round-robin measurement using microwave coplanar waveguide probes are presented. The round-robin was initiated and coordinated by the TRW Equipment Management Center's Measurement Engineering Department. Nine probe sites, both within and outside of TRW, participated in the round-robin. Each participant used the same Cascade Microtech Impedance Standard Substrate, the same measurement and calibration structures, the same calibration method, and the same network analyzer conditions. S-parameter measurements were performed over the frequency range of .045-26.5 GHz on the following passive structures: a 10 dB attenuator, a 20 dB attenuator, and a 50 ohm transmission line. In addition to the data comparison between the various probe sites, measurement repeatability results obtained within the TRW Measurement Engineering Department will be presented.