On-Chip Integrated Inductors with Ni-Zn-Cu-Fe and Y-Bi-Fe Ferrite Thin-films for RF IC

On-chip RF integrated inductors with Ni_0.4Zn_0.4 Cu_0.2Fe₂O₄ and Y_2.8Bi _0.2Fe₅O₁₂ ferrite thin-films have been fabricated using IC compatible processes. The ferrite thin-films prepared by spin-coated method show good magnetic performance for RF inductor applications. The high-frequency characteristics of inductor samples are tested, compared and analyzed using the equivalent circuit, with the data of Co₇ZrO₉ ferrite inductor in prior work. The experiments demonstrate that, ferrite thin-film integration improves the inductor performance significantly, which is a promising way to achieve super compact high-performance on-chip inductors for RFIC