Magnetically levitated micro gyroscope and its software realized demodulation circuit

For the purpose to detect the low capacitance signal, which emerged in noise, the virtual instrument based detection scheme was used in the novel prototype of micro gyroscope structure. Software arithmetic and the software generated reference waveform were designed for the demodulator to pick up the variable capacitance. The result of the experiment shows that the software realized demodulator can eliminate the noise in the output signal, and the improved signal to noise ratio reaches 60dB. The minimum resolution of the turn angle is 0.04 degree. The application of the software realized demodulator shows the prospective for a high performance measurement technology in MEMS application