Movable Micromirrors - Design and Simulation

In this paper are presented the results of the simulation for two different types of movable micromirrors on silicon-on-insulator substrate: one thermal actuated based on bimorph layer and the other electrostatic actuated. The response of the micromirrors, consisting in the displacement along z axe was investigated in static and dynamic regime using Coventor and Ansys software taking into account the material parameters and geometry of the structure. The simulation results show that the displacement of 13 mum can be obtained for micromirrors structure based on bimorph actuator with arm length of 60 mum at 80 mV applied voltage. The second structure has a displacement of 11 mum at 40 V applied voltage