2D electro-optic probing combined with field theory based multimode wave amplitude extraction: a new approach to on-wafer measurement

A novel approach to on-wafer measurement is proposed, which combines the direct electro-optic probing technique with a field theory based extraction technique for the modal voltages of all relevant modes at arbitrary internal ports of a (III-V) MMIC. The approach can be extended to obtain the complex modal amplitudes of forward and backward propagating waves on interconnecting transmission lines. This makes it a unique method for measurement of mode conversion in N-port components and their multimode S-parameter characterization.<
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