On Wafer Broadband Measurement for Substrate Material Characterisation

Measurement of broadband substrate permittivity with temperature is reported making use of special calibration routines for post-processing of measured results. The LRRM method is used for frequency coverage in the range 50 MHz to 110 GHz using 100 mum GSG probes. Predictive software has been integrated with the existing measurement control package to achieve semi-automatic material characterisation