Finite element modeling of an ultrasonic capacitive transducer

A model for an ultrasonic capacitive transducer based on the finite element method has been proposed in order to allow in depth study of the central frequency, the frequency bandwidth and the transduction efficiency. The involved electrical and mechanical phenomena and their coupling by the electrostatic force are discussed. This model considers the air inside the grooves, the shape and size of the grooves, the mechanical tension applied to the membrane, and its mass and elasticity. The model was implemented using the ANSYS software