Multiple-wavelength vertical cavity laser arrays on patterned substrates

We demonstrate a spatially chirped resonant wavelength in vertical cavities and vertical cavity surface emitting lasers (VCSEL's) grown by Molecular Beam Epitaxy. The wavelength shift is achieved by varying the GaAs growth rate across the wafer using a patterned backing substrate to induce a lateral temperature profile. Temperature patterns transfer to thickness patterns with a resolution on the millimeter scale. We demonstrate 8-nm periodic cavity mode shifts in GaAs-AlAs Fabry-Perot vertical cavities, and a 20-nm shift in lasing wavelength in a VCSEL array.<>