GaAs integrated circuit fabrication at Motorola

Compound Semiconductor (CS-1) is Motorola's first production-oriented gallium-arsenide integrated-circuit fabrication facility. Initiated in the Fall of 1990, CS-1 is a state-of-the-art manufacturing facility designed to support the growing internal Motorola needs for GaAs ICs for consumer products. The authors overview current CS-1 process flows, low-cost processing methodologies, online production monitoring, and fast cycle time capabilities.<>