A pole-placement partial state reference model adaptive control of a rapid thermal processor

Rapid thermal processing techniques are more and more applied in microelectronic technology. Modelling of the process thermal behaviour leads to very complex mathematical models. These are the reasons why adaptive control techniques can be chosen. A CARIMA model is an interesting input-output model of the thermal processor, whose parameters can be estimated online, using an identification scheme including supervisory actions. The adaptive control algorithm is a full-state feedback pole-placement law with an adaptive observer. A partial-state reference model was included in the control law algorithm. This type of control law can be implemented even for non-minimum phase systems, time-varying dynamics, wrong assumption about the time-delay of the system, and when disturbances on the load exist. Experimental results are presented showing better performance when using an adaptive control strategy.<>