High power VUV pulse generation by anti-Stokes Raman scattering and its application to ablation processes

In this paper, we report new approaches to increase the scattering efficiency to high-order anti-Stokes waves in stimulated Raman scattering together with characteristics of the VUV anti-Stokes beams. By modifying pump pulses to have the steep leading edge, the efficiency of VUV anti-Stokes generation was much improved. We also report developments of two types of the laser systems by ASRS in hydrogen for materials processing based on the fundamental research mentioned above and VUV laser ablations demonstrated of polytetrafluoroethylene (PTFE) films and quartz substrates.<>