Precision SAW pressure sensors

The design and performance of two types of SAW (surface acoustic wave) pressure sensors are considered. SAW resonator oscillators with metal strip gratings designed for operation at 200 and 360 MHz have been used in both types of devices. The sensitivity and the nonlinearity of both sensors, a sensor with a sensitive element shaped as an integral crystal diaphragm and a sensor with mechanically loaded quartz plates, are measured. Recommendations are made on the optimal configuration of the SAW pressure sensor according to pressure and dynamic range requirements.<>